SM:
Module Process Definition:
Target operation EQP capability should be Single Recipe or Batch.
SM: The Multiple Recipe Capability of Equipment should be ''Single
Recipe'' or ''Batch''.
The flow batch section should be continuous and individual.
Different module PD can have the same flow batch name.
The last operation of the flow batch section should be target operation.
Other operations could be target operation or not.
Flow batch Max batch size should less than any target EQP Max batch size
and Min batch size should more than any EQP Min batch size of the section.
The same as wafer count.
The batch size and wafer count of the same flow batch section would be the
same.
Sub-Route:
Lots should be removed from the flow batch before executing the operation
(sub-route). (MRM)
MM: Branch Error. Reason: Flow Batched lots cannot go out of the flow
batch section.
MM: Branch Error. Reason: Flow Batched lots cannot jump over the target
operation in the flow batch section.
Lots not in any flow batch section cannot jump to flow batch section
except the first operation.
MM: Branch Error. Return point of the branch route is in a Flow Batch Section.
Lots in any flow batch section don't have flow batch ID cannot branch to
sub-route in flow batch section.
MM: Branch Error. Return point of the branch route is in a Flow Batch Section.
If sub-route has only one operation, lots can return to flow batch section
normally.
If sub-route has more than one operation, flow batch ID will be removed
after one lot operation complete the first operation of the sub-route.
Lots in sub-route cannot locate to flow batch section.
Lots cannot branch to sub-route have flow batch section.
The other lots of the original flow batch cannot branch to sub-route but
could still use the equipment of its operations.
But because the flow batch ID is blank, the other lots can only gate pass
current operations, operation start will fail. (No matter if it is target
operation.)
Operators should locate the lots to the first operation of the flow batch and
flow batching again.
MM:
Normal:
Before flow batching, Xfer status should be '?I' (SI/MI/BI/II).
All lots in one carrier should be selected to flow batching or remove from
flow batch together.
If one lot be locate to out of the flow batch section, and be removed from
the flow batch. The flow batch can work continuously.
The first target operation equipment candidate lots list will only show
all lots in the first operation of the flow batch section and don't have flow
batch ID.
Lots in Candidate Lots List of the same flow batch (name) in same Mod PD
in same or different route can select to flow batch together.
Lots in different flow batch and lots in different Mod PD cannot do it.
MM: Lot with different temporary Batch ID is selected.
The what's next list of equipment of the flow batch do not list lots have
flow batch ID but have not reserved flow batch.
The target operation equipment can set Max count of Flow Batch to reserve.
If flow batch is reserved, the target operation equipment cannot run other
lots.
Lots of flow batch could operation complete or gate pass to the target
operation separate.
At target operation equipment, all lots of the flow batch should start
reserve or operation start together.
The target operation equipments after the first one can only equipment
reserve or rebatching. The candidate lots list shows nothing.
After lots operation complete one target operation equipment, operators
should reserve next target operation equipment or rebatching the lots.
The floating batch list will show carriers have flow batch ID but without
reserve equipment, and at the section between the target operation and the
before one.
Rebatching select carriers in floating batch list, operators cannot select
by lot.
After rebatching, if any original flow batch size is invalid, the floating
batch will be released automatically.
After remove lots from flow batch, the new flow batch size should be valid.
Locate:
Lots not in any flow batch section could only locate to the first
operation.
Lots have flow batch ID (no matter if lots have reserved flow batch) could
locate to any operations of the flow batch section, but cannot pass through a
target operation.
If lots want to locate pass through target operation, lots can only locate
to the first operation of the flow batch, and the lots will be automatically
removed from flow batch. (New flow batch size should be valid.)
If lots have flow batch ID (no matter if lots have reserved flow batch)
locate to out of flow batch section, the lots will be automatically removed
from flow batch.
(New flow batch size should be valid.)
Gate Pass:
Mandatory = No
Lots could gate pass the target operation which is not a mandatory
operation, no matter where the other flow batch members are.
After one lot has reserved flow batch gate pass the target operation, the
lot can only use the original target operation equipment (of reserved flow
batch) in other target operation.
But because machine recipe information has not been defined in other target
operations, lots cannot start reserve or load in target operation.
Operators should gate pass all lots and reserve or rebatching the next target
operation equipment.
If one lot gate passes the last target operation of the flow batch, the
flow batch will be removed.
The other lots of the original flow batch could still use the equipment of
its operations.
But because the flow batch ID is blank, the other lots can only gate pass
current operations, operation start will fail. (No matter if it is target
operation.)
Operators should locate the other lots to the first operation of the flow
batch and flow batching again.
--
總算整理的差不多了...
整理完好噁心...XD
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