[研究] double patterning/exposure

[yellowfishie (喵喵喵喵~~~)]

For double patterning/exposure,
wiki 的網頁有更新:
http://en.wikipedia.org/wiki/Double_patterning

There are several types of double patterning. The four most common types are:
double exposure, spacer mask, heterogeneous mask, and intermediate pattern
accumulation.

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