時間：97年11月12日（三）13：30～15：20
地點：交通大學光復校區工程五館 B1 國際會議廳
主講者：Dr. Ming C. Wu (吳明強博士), Co-Director of BSAC, UC Berkeley
講題：Optical MEMS and Silicon Photonics
摘要：
The telecom boom in the late 1990s and early 2000s has accelerated
the maturation of the optical MEMS technology. A wide range of
optical MEMS components were taken from laboratories to reliable
products. In this talk, I will review the current state of the art of the
MEMS devices and subsystems for telecom and data-com
applications. Devices for display application will also be discussed.
Silicon photonics is a new emerging area that leverages the immense
capability of established CMOS foundries to make nanophotonic
integrated circuits. High speed modulators and detectors have been
demonstrated. Adding MEMS to Si Photonics opens up many new
opportunities. Tunable and reconfigurable devices can be realized. I
will MEMS-based tunable Si microdisk resonators developed at UC
Berkeley. Variable bandwidth filters and reconfigurable optical
add-drop multiplexers have been demonstrated. Finally, I will talk
about the integrated semiconductor lasers on Si, a critical but
missing component of Si Photonics. We used optoelectronic
tweezers to assemble pre-fabricated InGaAsP microdisk lasers (5um
diameter, 200nm thickness) directly on silicon waveguides on SOI
platform. Sub-mW threshold has been achieved.
吳明強博士簡歷：
Ming C. Wu is Professor of Electrical Engineering and Computer
Sciences, and Co-Director of Berkeley Sensor and Actuator Center
(BSAC) at the University of California, Berkeley. He is also Chief
Scientist of CITRIS, and Director of Berkeley Microfabrication
Laboratory.
Dr. Wu received his B.S. degree in Electrical Engineering from National
Taiwan University, and M.S. and Ph.D. degrees in Electrical Engineering
and Computer Sciences from the University of California, Berkeley in
1985 and 1988, respectively. From 1988 to 1992, he was a Member of
Technical Staff at AT&T Bell Laboratories, Murray Hill, New Jersey.
From 1992 to 2004, he was a professor in the Electrical Engineering
department at the University of California, Los Angeles (UCLA). He has
been a faculty member at Berkeley since 2004. His research interests
include MEMS (micro-electro-mechanical systems), MOEMS,
semiconductor optoelectronics, nanophotonics, and biophotonics. He has
published 7 book chapters, over 155 journal papers and 300 conference
papers. He is the holder of 19 U.S. patents. Prof. Wu is a Fellow of IEEE,
and a member of Optical Society of America. He was a Packard
Foundation Fellow from 1992 to 1997. He received the 2007 Paul F.
Forman Engineering Excellence Award from Optical Society of
America.
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